radial line slot antenna for this application. Previous studies were presented in [2]. In that paper, the idea of the monopulse antenna was implemented at Ku band. However, there was not an optimization process of the slot (position and length). This paper shows the optimization process for the slot arrangement Design Method, Analysis and Prototypes of Radial Line Slot ... II. Radial Line Slot Antenna Structure Figure 1 shows the structure of the antenna. A Radial Line Slot Antenna is formed by a parallel plate structure, whose height is less than half a wavelength to avoid the propagation of upper modes. A radial TEM mode is generated through a coaxial probe (or several probes). Radial Microstrip Slotline Feed Network for Circular Mobile ... antenna and a Ka-Band printed dipole [1]. In addition, a L-Band mechanically steered microstrip array [2], a L-Band microstrip phased array tracking antenna for mounting on a car roof [3] and a X-Band radial line slotted waveguide antenna [4] have been demonstrated. In the above electronically scanned printed Design of a slot-coupled radial line helical array antenna ... An eight-ring radial helical array antenna based on a novel slot-coupled structure is designed and simulated. The novel coupling structure has the advantages of high power-handling capacity and excellent coupling ability.
plasma diffuses into the wafer surface through a wide process space, and uniform density is realized over the entire wafer surface. They cannot be applied to high speed processes for large-diameter-wafers (300 mm), because of the wide process space. A radial line slot antenna (RLSA) is a waveguide planar
The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. Radial line slot antenna having a conductive layer - Tokyo ... The plasma source 130 comprises a surface wave plasma (SWP) source, such as a radial line slot antenna (RLSA), to be discussed below. As seen in FIG. 1A, the plasma processing system 100 comprises a gas supply system 135 coupled to the processing chamber 110 and configured to introduce a process gas to process space 115. During dry plasma ... US20160293389A1 - Dipole ring magnet assisted microwave ... The plasma source 22 of the system 10 may be a surface-wave plasma (SWP) source that includes a radial line slot antenna 24. The plasma source 22 may be energized by direct current, radio frequency, microwave energy, or other energy sources known to the art. Research - 東京工業大学
A Design of Compact Radial Line Slot Array (RLSA) Antennas ...
Analysis of a high power microwave radial line slot … A traditional radial line slot antenna (RLSA) is a high gain planar array. To improve the power handling capacity, we design a radial line slow wave structure which replaces a traditional dielectric sheet in the radial waveguide of the traditional RLSA. This high power microwave (HPM) RLSA is fed from a...
JP2006107994A - Microwave plasma treatment device - Google…
The SWP plasma source 20 of the system 10 described above, particularly the microwave (MW) radial line slot antenna plasma source that employs the EM wave launcher 22 described in connection with FIGS. 3-6, produces a kind of diffusion plasma that can have quiescent low temperature plasma near the substrate processing region through a pure ...
Radial Line Slot Antenna - Chiba U
The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature.
The radial line slot antenna (RLSA) is a slotted waveguide planar antenna, which ... [5], which proves feasible in using radial line waveguide to feed the antenna .... Application,” IEEE Transactions on Plasma Science., vol. 43, pp. 3527. - 3529 ... OSA | Generation of vectorial optical fields with slot-antenna-based ... Acting as local linear polarizers, these slot antennas enable the spatial modulation of optical fields in amplitude, phase, and polarization for the cross- polarized ...